Plasmas and Materials
Category
Published on
Abstract
Outline
- Part 1: This lecture
- Introduction
- Models to understand the plasma process
- Part 2: Can be viewed here
- Chemistry
- Analyzing recipe parameters, and the resultant etch profiles
- Endpoint
Sponsored by
The Nanotechnology Applications and Career Knowledge (NACK) Network
Funded, in part, by a grant from the National Science Foundation. DUE 1205105
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