Plasmas and Materials

By Terry Kuzma1, NACK Network1

1. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline

  • Part 1: This lecture
    • Introduction
    • Models to understand the plasma process
  • Part 2: Can be viewed here
    • Chemistry
    • Analyzing recipe parameters, and the resultant etch profiles
    • Endpoint

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Terry Kuzma; NACK Network (2018), "Plasmas and Materials," http://nanohub.org/resources/28329.

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