Secondary Ion Mass Spectrometry (SIMS)

By Terry Kuzma1; NACK Network1

1. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

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Abstract

Outline

  • Secondary Ion Mass Spectrometry
    • Overview – History
    • Principles of Operation
    • SIMS Issues

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Terry Kuzma, NACK Network (2018), "Secondary Ion Mass Spectrometry (SIMS)," https://nanohub.org/resources/29324.

    BibTex | EndNote

Tags

  1. ATE Centers
  2. mass spectrometry
  3. NACK Network
  4. Spectroscopy
Secondary Ion Mass Spectrometry (SIMS)
  • Secondary Ion Mass Spectrometry (SIMS) 1. Secondary Ion Mass Spectrometr… 0
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  • Outline 2. Outline 381.51484818151488
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  • Secondary Ion Mass Spectrometry (SIMS) 3. Secondary Ion Mass Spectrometr… 447.78111444778114
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  • Secondary Ion Mass Spectrometry (SIMS) 4. Secondary Ion Mass Spectrometr… 618.6186186186186
    00:00/00:00
  • Outline 5. Outline 765.73239906573247
    00:00/00:00
  • Principles of Operation 6. Principles of Operation 773.40674007340681
    00:00/00:00
  • Principles of Operation 7. Principles of Operation 1026.6933600266934
    00:00/00:00
  • Principles of Operation 8. Principles of Operation 1312.2789456122789
    00:00/00:00
  • Principles of Operation 9. Principles of Operation 1470.8708708708709
    00:00/00:00
  • Simple SIMS Block Diagram 10. Simple SIMS Block Diagram 1702.3690357023691
    00:00/00:00
  • Principles of Operation 11. Principles of Operation 2125.7590924257593
    00:00/00:00
  • Principles of Operation 12. Principles of Operation 2218.2182182182182
    00:00/00:00
  • Principles of Operation 13. Principles of Operation 2555.121788455122
    00:00/00:00
  • Ion Emission 14. Ion Emission 2767.3006339673007
    00:00/00:00
  • Gaseous Ionization 15. Gaseous Ionization 2992.4257590924258
    00:00/00:00
  • Gaseous Ionization 16. Gaseous Ionization 3134.6346346346349
    00:00/00:00
  • Surface Ionization 17. Surface Ionization 3161.7951284617952
    00:00/00:00
  • Gaseous Ionization 18. Gaseous Ionization 3206.53987320654
    00:00/00:00
  • Liquid Metal Ionization 19. Liquid Metal Ionization 3252.6526526526527
    00:00/00:00
  • Dual Ion Gun System 20. Dual Ion Gun System 3333.0663997330666
    00:00/00:00
  • Some SIMS Issues 21. Some SIMS Issues 3454.2542542542542
    00:00/00:00
  • Cs and O2 Ion Selection 22. Cs and O2 Ion Selection 3681.7817817817818
    00:00/00:00
  • SIMS 23. SIMS 3924.3910577243914
    00:00/00:00
  • Outline 24. Outline 3985.8525191858525
    00:00/00:00
  • SIMS Issues 25. SIMS Issues 3988.8221554888223
    00:00/00:00
  • SIMS Issues 26. SIMS Issues 4138.6386386386384
    00:00/00:00
  • Mass Analyzer Types 27. Mass Analyzer Types 4257.8244911578249
    00:00/00:00
  • SIMS Detection 28. SIMS Detection 4307.4074074074078
    00:00/00:00
  • SIMS Detection 29. SIMS Detection 4382.5492158825491
    00:00/00:00
  • SIMS Issues 30. SIMS Issues 4594.2942942942946
    00:00/00:00
  • SIMS Issues 31. SIMS Issues 4680.8808808808808
    00:00/00:00
  • SIMS Summary 32. SIMS Summary 4729.1291291291291
    00:00/00:00
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