Image Analysis Program for Quantifying Nanosphere Lithography Packing Defects

By Takara Truong1; Roseanne Warren1

1. University of Utah

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Abstract

This download resource provides MATLAB code files for scanning electron microscopy image analysis of nanosphere packing defects. The program enables users to estimate the total number of nanospheres in an image, the number of non-hexagonally close-packed (HCP) spheres, and the % of spheres that are HCP. Brightness thresholds and sphere radius range can be adjusted to account for variations in the starting SEM between users. The required files to run the program are: SEMGUI.fig, SEMGUI.m, nanosphere_main.m, as well as two functions available for download on MATLAB's file exchange (RemoveOverLap.m, and snip.m). The MATLAB image processing toolbox is also required.

Sponsored by

NSF Award No. 1761273

Cite this work

Researchers should cite this work as follows:

  • Takara Truong, Roseanne Warren (2020), "Image Analysis Program for Quantifying Nanosphere Lithography Packing Defects," https://nanohub.org/resources/33853.

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Tags

  1. image processing
  2. MATLAB
  3. nanolithography
  4. nanospheres
  5. scanning electron microscopy (SEM)