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Adam Marc Munder
Rostislav Vladimirovich Lapshin
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Interference Lithography: Scalable Fabrication of Periodic Nanostructures
08 Mar 2014 | Contributor(s):: Chih-Hao Chang
Periodic nanostructures have many applications in a broad range of research areas such as photonics, surface wetting, and bio-inspired engineering. Based on the interference of light, interference (or holographic) lithography is a maskless technique that is extremely effective way to pattern...
ECET 499N Lecture 10: Nanomaterials
12 Apr 2010 | | Contributor(s):: Helen McNally
Illinois ME 498 Introduction of Nano Science and Technology, Lecture 27: Optical Methods
21 Jan 2010 | | Contributor(s):: Nick Fang, Omar Sobh
Optical MathodsTopics: Photomask and Reticles Positive and Negative Lithography Relationship between Mask and Resist 8 Steps of Photolithography Photolithographic Process Positive Photoresists Negative Photoresists Chemistry of Photo-Crosslinking A simplified Model of Polymerization Photoresist...
ME 597 Lecture 26: Scanning Probe Nanolithography
02 Dec 2009 | | Contributor(s):: Ron Reifenberger
Topics:STM – early workArranging atoms with a tipLocal Oxidation Lithography (Electrochemical)Dip Pen LithographyNanografting