ME 290R Lecture 12.2: Scanning-beam Lithography and Directed Self-assembly II

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 12.2: Scanning-beam Lithography and Directed Self-assembly II," https://nanohub.org/resources/30499.

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Tags

  1. lithography
  2. nanomanufacturing
  3. nanoMFG Node
  4. processing
  5. scanning-beam lithography
  6. self-assembly