Photolithography (Option A)
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Abstract
This module presents an introduction and demonstration of photolithography, the process of copying a high-resolution pattern onto multiple substrates. Students replicate key steps in the process of photolithography and learn how these processes fit into the fabrication of micro- and nanoscale devices such as integrated circuits. This activity uses solvents and chemicals similar to those used in the electronics industry to perform a key step in the process of manufacturing real integrated circuits.
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Disponible en Español: Fotolitografía Opción A (a base de solvente).
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National Science Foundation
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Dakota County Technical College/ Nano-Link: Center for Nanotechnology Education