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By Jason Clark1, Prabhakar Marepalli1

1. Purdue University

A tool for ready-made MEMS

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Version 0.05 - published on 23 Jul 2010

doi:10.4231/D3QR4NQ4Z cite this

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Version Released DOI Handle Published
0.05 23 Jul 2010 doi:10.4231/D3QR4NQ4Z yes
0.04 21 Jun 2010 doi:10.4231/D3SN01401 no
0.03 18 Mar 2010 doi:10.4231/D3Q23R04H no
0.02 12 Mar 2010 doi:10.4231/D3GH9B86P no
0.01 08 Mar 2010 doi:10.4231/D3VQ2S94C no, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.