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By jason clark1, Prabhakar Marepalli1, xing jin1, Aarti Chigullapalli1

1. Purdue University

MEMS design, modeling, and simulation

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Version 0.05w - published on 16 Apr 2015

doi:10.4231/D3J38KJ5S cite this

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Version Released DOI Handle Published
0.05w 16 Apr 2015 doi:10.4231/D3J38KJ5S yes
0.05 23 Jul 2010 doi:10.4231/D3QR4NQ4Z no
0.04 21 Jun 2010 doi:10.4231/D3SN01401 no
0.03 18 Mar 2010 doi:10.4231/D3Q23R04H no
0.02 12 Mar 2010 doi:10.4231/D3GH9B86P no
0.01 08 Mar 2010 doi:10.4231/D3VQ2S94C no, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.