We are aiming at the realization of microsystems and nanosystems with novel and unique functions by integrating functional elements in different domains such as mechanics, electronics, chemistry, optics and biotechnology. These micro/nano systems are expected to be novel machines, which will support the 21st century. In this presentation research pursued in Nano/Micro System Engineering Lab., a three dimensional micro fabrication and micro/nano assembling technology for construction of micro/nano systems, evaluation of mechanical properties of thin films, micro sensors, micro-actuators will be introduced.