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Laser Shock Fabrication of Metallic Micro/Nanostructures
Online Presentations | 03 Nov 2016 | Contributor(s):: Yaowu Hu
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ECE 695Q Lecture 43: Advanced Lithography III
Online Presentations | 01 Nov 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 41: Advanced Lithography I
Online Presentations | 12 Oct 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication
Online Presentations | 12 Oct 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 37: Nanoimprint Lithography (NIL) - Resist for UV-NIL
Online Presentations | 12 Oct 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 29: Focused Electron Beam Induced Deposition and Deposition Rate
Online Presentations | 10 Oct 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL
Online Presentations | 28 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools
Online Presentations | 26 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches
Online Presentations | 26 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists
Online Presentations | 21 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint
Online Presentations | 21 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 34: Nanoimprint Lithography – Pattern Dependence in Nanoimprint
Online Presentations | 21 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 35: Nanoimprint Lithography – UV Assisted Nanoimprint
Online Presentations | 21 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 21: E-Beam Lithography Process
Online Presentations | 20 Sep 2016 | Contributor(s):: Minghao Qi
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ECE 695Q: Nanometer Scale Patterning and Processing
Courses | 11 Jul 2016 | Contributor(s):: Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.
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ECE 695Q Lecture 16: Electron Optics and Lithography I
Online Presentations | 29 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
Online Presentations | 21 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 10: Optical Lithography – Resolution Enhancement Techniques
Online Presentations | 17 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 15: Extreme UV (EUV) Lithography – Optics, Mask, Resist, and Contaminaton Control
Online Presentations | 17 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 17: Electron Optics and Lithography II
Online Presentations | 16 Jun 2016 | Contributor(s):: Minghao Qi