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Learning Module: MEMS Micromachining Overview
22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
Learning Module: MEMS Micromachining Overview - Instructor Guides
Learning Module: Photolithography Overview for MEMS
26 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. Activities allow you to further explore some of these concepts.
Small Scale Stenciling: Mask Lab
05 Apr 2016 | | Contributor(s):: Marilyn Garza
This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which are found in electronic circuits. The content is appropriate for students in middle school or...
Silvaco Athena - Part 1
04 Aug 2011 | | Contributor(s):: Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
Silvaco Athena - Part 2
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
Device Parameters Extraction Within Silvaco Simulation Software
30 Jul 2011 | | Contributor(s):: Dragica Vasileska
This set of slides explains the extract statements within SILVACO simulation software.