ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication," http://nanohub.org/resources/30335.

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ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication
  • Lecture 5: Nanoimprint lithography: stamp fabrication 1. Lecture 5: Nanoimprint lithogr… 0
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  • Design questions for a stamp Format? 2. Design questions for a stamp F… 52.185518852185524
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  • Some example process flows for stamp fabrication 3. Some example process flows for… 61.1277944611278
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  • Elastic stamp deformations 4. Elastic stamp deformations 481.18118118118122
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  • Air cushion press: using wafer bending 5. Air cushion press: using wafer… 645.87921254587923
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  • Wafer bowing/bending to make contact 6. Wafer bowing/bending to make c… 815.51551551551552
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  • Substrate Conformal Imprint Lithography 7. Substrate Conformal Imprint Li… 891.725058391725
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  • 8. "Rigiflex" stamps 1240.9409409409409
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  • Long-range compliance and short-range rigidity 9. Long-range compliance and shor… 1349.3159826493161
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  • Structured stamps 10. Structured stamps 1471.0043376710044
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  • Even a small flexure-gap increases wafer-scale stamp compliance 11. Even a small flexure-gap incre… 1554.4878211544879
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  • Simulations using a measured wafer topography 12. Simulations using a measured w… 1591.157824491158
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  • Simulations using a measured wafer topography 13. Simulations using a measured w… 1659.9265932599267
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  • Simulations using a measured wafer topography 14. Simulations using a measured w… 1837.6376376376377
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  • Die-scale simulations 15. Die-scale simulations 1838.8388388388389
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  • Structured stamps also allow for 'decoupling' 16. Structured stamps also allow f… 1840.6740073406741
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  • Stamp bending to guide droplet spreading 17. Stamp bending to guide droplet… 1844.477811144478
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  • Multilevel stamps 18. Multilevel stamps 1953.7871204537871
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  • Self-aligned Imprint Lithography 19. Self-aligned Imprint Lithograp… 2014.3143143143143
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  • Self-aligned Imprint Lithography 20. Self-aligned Imprint Lithograp… 2124.3576910243578
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  • Self-aligned imprint lithography 21. Self-aligned imprint lithograp… 2271.7050383717051
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  • Capacity-equalized molds/stamps 22. Capacity-equalized molds/stamp… 2303.9706373039708
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  • Stamps with integrated heaters for accelerated thermal NIL 23. Stamps with integrated heaters… 2670.2369035702368
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