ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication
ME 290R Lecture 5: Nanoimprint Lithography – Stamp Fabrication
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1. Lecture 5: Nanoimprint lithogr…
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2. Design questions for a stamp F…
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3. Some example process flows for…
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4. Elastic stamp deformations
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5. Air cushion press: using wafer…
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6. Wafer bowing/bending to make c…
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7. Substrate Conformal Imprint Li…
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8. "Rigiflex" stamps
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9. Long-range compliance and shor…
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10. Structured stamps
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11. Even a small flexure-gap incre…
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12. Simulations using a measured w…
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13. Simulations using a measured w…
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14. Simulations using a measured w…
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15. Die-scale simulations
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16. Structured stamps also allow f…
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17. Stamp bending to guide droplet…
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18. Multilevel stamps
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19. Self-aligned Imprint Lithograp…
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20. Self-aligned Imprint Lithograp…
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21. Self-aligned imprint lithograp…
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22. Capacity-equalized molds/stamp…
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23. Stamps with integrated heaters…
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