Nano-Characterization and Nano-Fabrication using EB/IB Tools

By Tomoko Borsa1; NACK Network2

1. Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC), University of Colorado, Boulder, CO 2. Nanotechnology Applications and Career Knowledge Network, Pennsylvania State University, State College, PA

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Bio

Tomoko Borsa Tomoko Borsa was born in Tokyo, Japan and completed a BS and MS at Waseda University, where she was exposed to the field of scanning electron microscopy for the first time. She then earned a Ph.D. in Materials Science with an emphasis on Chemistry of Materials from Colorado School of Mines. She also received an MS in Electrical Engineering (Photonics and Nanostructures) from University of Colorado Boulder. She also has extensive experience in the area of micro/nanofabrication including electron beam lithography and related process development.

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Researchers should cite this work as follows:

  • Tomoko Borsa, NACK Network (2022), "Nano-Characterization and Nano-Fabrication using EB/IB Tools," https://nanohub.org/resources/36343.

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