Tags: processing

Resources (101-120 of 126)

  1. Introduction of MEMS Activity at Nano/Micro System Engineering Lab., Kyoto University

    15 Sep 2007 | | Contributor(s):: OSAMU TABATA

    We are aiming at the realization of microsystems and nanosystems with novel and unique functions by integrating functional elements in different domains such as mechanics, electronics, chemistry, optics and biotechnology. These micro/nano systems are expected to be novel machines, which will...

  2. Micro-scaled Biochips with Optically Active Surfaces for Near and Far-field Analysis of Cellular Fluorescence

    31 Aug 2007 | | Contributor(s):: Huw Summers

    The integration of thin (< 100 nm) metal films with micro-scaleoptical waveguides provides a route to controlled spatialexcitation of cellular fluorescence within a biochip platform.Surface bound electron-plasma oscillations (surface plasmon waves)interact with photons to produce an evanescent...

  3. Nanotechnology: Considerations for Facility Design

    21 May 2007 | | Contributor(s):: John Weaver

    The growing area of study broadly termed nanotechnology provides a new set of challenges to the facility designer. While evolutionary changes in the quality of clean spaces occur, it is the collaborative nature of this field that requires revolutionary changes in facility design. The main...

  4. tsuprem4

    30 Apr 2007 | | Contributor(s):: Steven Clark

    TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.

  5. Nanoscale Antenna Apertures

    24 Apr 2007 | | Contributor(s):: Xianfan Xu

    This presentation will discuss light concentration and enhancement in nanometer-scale ridge aperture antennas. Resent research, including numerical simulations and near field optical measurements has demonstrated that nanoscale ridge antenna apertures can concentrate light into nanometer domain....

  6. BNC Annual Research Symposium: Nanoscale Energy Conversion

    23 Apr 2007 | | Contributor(s):: Timothy S Fisher

    This presentation is part of a collection of presentations describing the projects, people, and capabilities enhanced by research performed in the Birck Center, and a look at plans for the upcoming year.

  7. Planning for Disaster: Designing a Cleanroom to Minimize Risk Should a Disaster Occur

    09 Apr 2007 | | Contributor(s):: John Weaver

    The cleanliness levels of a cleanroom or other high-technology facility make it inherently vulnerable to a disaster such as a fire. Historically, even a small event of this type can cause significant downtime and cost millions of dollars in remediation. When designing a cleanroom, steps can be...

  8. High-Aspect-Ratio Micromachining of Titanium: Enabling New Functionality and Opportunity in Micromechanical Systems Through Greater Materials Selection

    09 Apr 2007 | | Contributor(s):: Masa Rao

    Traditionally, materials selection has been limited in high-aspect-ratio micromechanical applications, due primarily to the predominance of microfabrication processes and infrastructure dedicated to silicon. While silicon has proven to be an excellent material for many of these applications, no...

  9. Process Lab: Defect-coupled diffusion

    09 Oct 2006 | | Contributor(s):: Shuqing (Victor) Cao, Yang Liu, Peter Griffin

    This tool simulates dopant diffusion coupled with point defects.

  10. Process Lab: Concentration-Dependent Diffusion

    09 Oct 2006 | | Contributor(s):: Shuqing (Victor) Cao, Yang Liu, Peter Griffin

    This modules simulates both the standard diffusion and concentration-dependent diffusion.

  11. Process Lab:Oxidation

    09 Oct 2006 | | Contributor(s):: Shuqing (Victor) Cao, Yang Liu, Peter Griffin

    Integrated Circuit Fabrication Process Simulation

  12. Process Lab: Oxidation Flux

    09 Oct 2006 | | Contributor(s):: Shuqing (Victor) Cao, Yang Liu, Peter Griffin

    This module simulates the oxidation flux.

  13. Exploring Electron Transfer with Density Functional Theory

    11 Jun 2006 | | Contributor(s):: Troy Van Voorhis

    This talk will highlight several illustrative applications of constrained density functionaltheory (DFT) to electron transfer dynamics in electronic materials. The kinetics of thesereactions are commonly expressed in terms of well known Marcus parameters (drivingforce, reorganization energy and...

  14. EDA Challenges in Nanoscale Design: A Synopsys Perspective

    11 Apr 2006 | | Contributor(s):: Rich Goldman

    Rich Goldman gives an overview of the current state ofthe semiconductor and EDA (Electronic Design Automation) industry with aspecial focus on the impact of nanometer scale design on design tools andthe economics of the industry.

  15. Tutorial on Using Micelle-MD

    05 Apr 2006 | | Contributor(s):: Patrick Chiu, Kunal Shah, Susan Sinnott

    This is a tutorial using Micelle-MD. This includes the main capabilities, computation procedure, with format of files generated, and the simulation setup, which includes the material models implemented.

  16. Mechanical Properties of Surfactant Aggregates at Water-Solid Interfaces

    05 Apr 2006 | | Contributor(s):: Patrick Chiu, Kunal Shah, Susan Sinnott

    This is a talk on the mechanical properties of surfactant aggregates at water-solid interfaces using Micelle-MD. This includes silica indentations of micelles with comparison to experimental data and graphite indentation of Micelle.

  17. Thermal Microsystems for On-Chip Thermal Engineering

    04 Apr 2006 | | Contributor(s):: Suresh V. Garimella

    Electro-thermal co-design at the micro- and nano-scales is critical for achieving desired performance and reliability in microelectronic circuits. Emerging thermal microsystems technologies for this application area are discussed, with specific examples including a novel micromechanical...

  18. A Primer on Semiconductor Device Simulation

    23 Jan 2006 | | Contributor(s):: Mark Lundstrom

    Computer simulation is now an essential tool for the research and development of semiconductor processes and devices, but to use a simulation tool intelligently, one must know what's "under the hood." This talk is a tutorial introduction designed for someone using semiconductor...

  19. Nano-Scale Device Simulations Using PROPHET-Part II: PDE Systems

    20 Jan 2006 | | Contributor(s):: Yang Liu, Robert Dutton

    Part II uses examples toillustrate how to build user-defined PDE systems in PROPHET.

  20. Nano-Scale Device Simulations Using PROPHET-Part I: Basics

    20 Jan 2006 | | Contributor(s):: Yang Liu, Robert Dutton

    Part I covers the basics of PROPHET,including the set-up of simulation structures and parameters based onpre-defined PDE systems.