nanoHUB.org - Questions and Answers: Chemical Equation for TDMAT ALD Formation of TiN?

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Anonymous @ 2:46 pm on 22 Apr 2014

Chemical Equation for TDMAT ALD Formation of TiN?

What is the chemical equation for the formation of Titanium Nitride in an ALD system using TDMAT?

atomic layer deposition (ALD)
TDMAT
titanium nitride (TiN)

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