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Equipment

ASM F120 ALD

Equipment home > Deposition > ASM F120 ALD

General Information:

Coral Name:
FIC: Peter Ye
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 2

System Information:

General Description:

Atomic Layer Deposition for growing crystals
-Al2O3, HfO2, ZrO2, and Ga2O3

Materials Compatibility:

Silicon substrates only

Useful Links:

* Must install Coral and be a trained user to reserve a slot on this system.