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Equipment
ASM F120 ALD
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Deposition > ASM F120 ALD
General Information:
Coral Name:
FIC: Peter Ye
Process/Equipment Owner: Jerry Shepard
Location: Cleanroom Bay G
Max Wafer Size: 2
System Information:
General Description:
Atomic Layer Deposition for growing crystals
-Al2O3, HfO2, ZrO2, and Ga2O3
Materials Compatibility:
Silicon substrates only
Useful Links:
* Must install Coral and be a trained user to reserve a slot on this system.
