General Information:

Coral Name: xef2
FIC: Shared
Process/Equipment Owner: Sean Rinehart
Location: Cleanroom S Bay
Max Wafer Size: 4

System Information:

General Description:

~Xactix Xenon Difluroide E1 etch system for MEMS applications
~Etch rates dependent on amount of exposed silicon

Capabilities:

~Any silicon based sample up to 4 inches.
~Isotropic etch for silicon

Useful Links:

• Equipment Use Fees
• Reserve System

* Must install Coral and be a trained user to reserve a slot on this system.