General Information:

Coral Name: stress_machine
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom S Bay
Max Wafer Size: 8 inch (200 mm)

System Information:

General Description:

The Thin Film Stress Machine is a non-destructive testing tool used to analyze the stress of thin films. The stress machine analyzes the radius of curvature of your whole wafer prior to the film being deposited. Then after film deposition, the stress machine reanalyzes your sample to compare to the original. This change in radius of curvature will then result in a film stress value in the units of MPa.

Capabilities:

~Capable of 3, 4, 5, 6, and 8 inch whole wafers
~Can measure film stress from ambient to 500°C
~Can measure film stress over a period of time
~Capable of graphing time vs stress, and temp vs stress
~Capable of measuring deflection of the substrate
~Nitrogen reduces oxidation during heating
~CDA can assist in cooling

Notes:

Note: You must know your substrate thickness and film thckness to achieve a proper stress value

Useful Links:

• Equipment Use Fees
• Reserve System

* Must install Coral and be a trained user to reserve a slot on this system.