ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Minghao Qi (2016), "ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics," https://nanohub.org/resources/24446.

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226 Electrical Engineering, Purdue University, West Lafayette, IN

Tags

  1. focused ion beam
  2. ion beams
  3. nano fabrication
  4. nanomanufacturing
ECE 695Q Lecture 23: Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics
  • Lecture 23 Nanofabrication with Focused Ion Beams – Overview & Ion Source and Optics 1. Lecture 23 Nanofabrication wit… 0
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  • Nanofabrication with Focused Ion Beams 2. Nanofabrication with Focused I… 25.925925925925927
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  • An Early Focused Ion Beam Tool 3. An Early Focused Ion Beam Tool 49.315982649315984
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  • Electrons vs Ions 4. Electrons vs Ions 150.75075075075077
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  • Electrons vs Ions: More Detailed 5. Electrons vs Ions: More Detail… 577.877877877878
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  • Focused ion beam (FIB) 6. Focused ion beam (FIB) 864.09743076409745
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  • Liquid Metal Ion Source (LMIS) 7. Liquid Metal Ion Source (LMIS) 876.84351017684355
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  • Field Induced Ionization 8. Field Induced Ionization 958.59192525859191
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  • Formation of the very Sharp Taylor Cone 9. Formation of the very Sharp Ta… 1128.4951618284952
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  • Characteristics of LIMS 10. Characteristics of LIMS 1188.7554220887555
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  • Why Ga+ 11. Why Ga+ 1409.1091091091091
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  • Different Ions can be separated from alloys 12. Different Ions can be separate… 1572.6726726726727
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  • Electro-Optic Column 13. Electro-Optic Column 1674.4411077744412
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  • Electrostatic Lenses 14. Electrostatic Lenses 2086.7534200867535
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  • Beam spot size of Focused Ions 15. Beam spot size of Focused Ions 2263.1631631631631
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  • Beam size vs. current 16. Beam size vs. current 2333.5335335335335
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  • Ion optics: overview 17. Ion optics: overview 2439.5061728395062
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