ECE 695Q Lecture 28: Focused Ion Beam Induced Deposition

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Minghao Qi (2016), "ECE 695Q Lecture 28: Focused Ion Beam Induced Deposition," https://nanohub.org/resources/24468.

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226 Electrical Engineering, Purdue University, West Lafayette, IN

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  1. nanomanufacturing
ECE 695Q Lecture 28: Focused Ion Beam Induced Deposition
  • Nanometer Scale Patterning and Processing Spring 2016 1. Nanometer Scale Patterning and… 0
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  • Focused ion beam (FIB) 2. Focused ion beam (FIB) 10.677344010677345
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  • DualBeam FIB/SEM plus GIS 3. DualBeam FIB/SEM plus GIS 15.415415415415415
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  • GIS: Gas Injection Systems 4. GIS: Gas Injection Systems 79.512846179512849
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  • FIB assisted (chemical vapor) deposition process 5. FIB assisted (chemical vapor) … 221.1544878211545
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  • Gases used for metal, oxide and C deposition 6. Gases used for metal, oxide an… 360.82749416082748
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  • Ion beam assisted deposition 7. Ion beam assisted deposition 534.16750083416753
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  • Collision cascade model – Au deposition 8. Collision cascade model – Au… 560.22689356022693
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  • FIB deposition: role of SE and primary ion 9. FIB deposition: role of SE and… 853.48682015348686
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  • Effect of ion species and energy on yield and purity 10. Effect of ion species and ener… 994.49449449449457
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  • Effect of ion incident angle 11. Effect of ion incident angle 1058.7587587587589
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  • Deposition parameters 12. Deposition parameters 1103.6703370036703
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  • Competition between deposition and sputtering 13. Competition between deposition… 1146.0460460460461
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  • Competition between deposition and sputtering 14. Competition between deposition… 1244.6446446446446
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  • Deposition limited by gas diffusion and absorption 15. Deposition limited by gas diff… 1290.4904904904906
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  • 3D structure by FIB deposition 16. 3D structure by FIB deposition 1361.594928261595
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