ECE 695Q Lecture 31: Scanning Helium Ion Microscopy (SHIM)

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Minghao Qi (2016), "ECE 695Q Lecture 31: Scanning Helium Ion Microscopy (SHIM)," https://nanohub.org/resources/24471.

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226 Electrical Engineering, Purdue University, West Lafayette, IN

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  1. nanomanufacturing
ECE 695Q Lecture 31: Scanning Helium Ion Microscopy (SHIM)
  • Lecture 31 Scanning Helium Ion Microscopy (SHIM) 1. Lecture 31 Scanning Helium Ion… 0
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  • Scanning Helium Ion Microscopy (SHIM) 2. Scanning Helium Ion Microscopy… 10.41041041041041
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  • SHIM vs FIB with Ga+ 3. SHIM vs FIB with Ga+ 200.46713380046714
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  • Field Ion Microscope: Helium Ion Source 4. Field Ion Microscope: Helium I… 280.74741408074743
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  • SHIM structure 5. SHIM structure 360.52719386052723
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  • Applications of SHIM 6. Applications of SHIM 437.53753753753756
    00:00/00:00
  • 0.24 nm Resolution of He Ion Microscopy 7. 0.24 nm Resolution of He Ion M… 472.97297297297297
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