Plasmas and Materials

By Terry Kuzma1; NACK Network1

1. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

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Abstract

Outline

  • Part 1: This lecture
    • Introduction
    • Models to understand the plasma process
  • Part 2: Can be viewed here
    • Chemistry
    • Analyzing recipe parameters, and the resultant etch profiles
    • Endpoint

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Terry Kuzma, NACK Network (2018), "Plasmas and Materials," https://nanohub.org/resources/28329.

    BibTex | EndNote

Tags

  1. ATE Centers
  2. chemistry
  3. dry etch
  4. educational
  5. educational resources
  6. fabrication
  7. materials
  8. materials science
  9. NACK Network
  10. nano technology
  11. plasma
Plasmas and Materials
  • Plasmas and Materials 1. Plasmas and Materials 0
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  • Outline 2. Outline 16.649983316649983
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  • Introduction 3. Introduction 74.374374374374383
    00:00/00:00
  • Introduction 4. Introduction 346.91358024691357
    00:00/00:00
  • Limits of Wet Etch Illustrates the Need for Plasma Processing 5. Limits of Wet Etch Illustrates… 545.07841174507848
    00:00/00:00
  • Plasma Etching 6. Plasma Etching 839.63963963963965
    00:00/00:00
  • Plasma 7. Plasma 1064.3643643643643
    00:00/00:00
  • Contents of a Plasma 8. Contents of a Plasma 1108.541875208542
    00:00/00:00
  • Selective Etching 9. Selective Etching 1271.0377043710378
    00:00/00:00
  • Outline 10. Outline 1531.9652986319654
    00:00/00:00
  • Plasma Glow Region 11. Plasma Glow Region 1548.5151818485153
    00:00/00:00
  • Ions vs. Radicals in a Plasma 12. Ions vs. Radicals in a Plasma 1694.0940940940941
    00:00/00:00
  • Plasma in Terms of Temperature, Chemistry, and Bombardment 13. Plasma in Terms of Temperature… 1840.7073740407075
    00:00/00:00
  • Pressure 14. Pressure 2112.445779112446
    00:00/00:00
  • Plasma in Terms of Temperature, Chemistry, and Bombardment 15. Plasma in Terms of Temperature… 2182.5158491825159
    00:00/00:00
  • Pressure 16. Pressure 2312.8795462128796
    00:00/00:00
  • The 17. The "Wine Glass" Etch Profile … 2388.455121788455
    00:00/00:00
  • Power 18. Power 2564.5645645645645
    00:00/00:00
  • Minimum Energy Required to Ionize a Particle 19. Minimum Energy Required to Ion… 2626.7600934267602
    00:00/00:00
  • The Six Steps of Plasma Etching 20. The Six Steps of Plasma Etchin… 2698.798798798799
    00:00/00:00
  • Gas Flow 21. Gas Flow 2707.9412746079415
    00:00/00:00
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