ECE 595AL Lecture 10.1: Nanoimprint Lithography - Material and Mechanism of Thermal Nanoimprint

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Cite this work

Researchers should cite this work as follows:

  • Minghao Qi (2020), "ECE 595AL Lecture 10.1: Nanoimprint Lithography - Material and Mechanism of Thermal Nanoimprint," https://nanohub.org/resources/32815.

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Location

EE 224, Purdue University, West Lafayette, IN