Scanning Electron Microscopy (SEM) has traditionally been the most frequently used micro-/nano- characterization technique to overcome the optical losses coming from lenses. In this talk we are going to begin by discussing the fundamental blocks of an SEM starting from the electron beam emission. We will talk about the key concepts like working distance, beam current, aberration and their effects on resolution and depth of focus. Beam specimen interactions will be categorized and studied. Various detection types will be introduced. Simple interactive Monte Carlo simulations will accompany the talk to understand the importance of low keV imaging. Furthermore, a very useful online tool that is available on myscope.training will be run together. We will also connect to an Field Emission (FE) SEM tool remotely and carry out an actual demo with the participants. In the remaining time, we will go over the basics of Electron Probe MicroAnalysis (EPMA) and compare it with the traditional SEM. Finally, we will look into Electron BackScatter Diffraction (EBSD) characterization technique and see what kind of new information we can collect about the specimen. No prior experience in any of these characterization methods will be required for attendance. The talk will aim to discuss the basic ideas and guide the interested participants in the right direction to get a deeper understanding with the shared supplementary materials.

Center for Nanotechnology Education and Utilization (CNEU)

Researchers should cite this work as follows:

• Atilla Ozgur Cakmak, NACK Network (2022), "Charged-Particle Interaction Analysis," https://nanohub.org/resources/35773.

  BibTex | EndNote

1. ATE Centers
2. charged particles
3. Electron Probe Microanalysis (EPMA)
4. Energy Dispersed X-ray Spectroscopy (EDS/EDX)
5. Imaging
6. microscopy
7. NACK Network
8. scanning electron microscopy (SEM)
9. Spectroscopy
10. transmission electron microscopy (TEM)
11. x-ray spectroscopy