The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.

MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors

Learn more about NEMS/MEMS from the many resources on this site, listed below. More information on NEMS/MEMS can be found here.

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  1. Jiushuai Xu


  2. SCME and URE Program – It’s about the Students!

    28 Oct 2020 | | Contributor(s):: Matthias Pleil, The Micro Nano Technology - Education Center

    This session will be talking about his 2021 MEMS workshop and the upcoming URE opportunities at the University of New Mexico.

  3. Evren Toptop


  4. Dinesh Ramkrushna Rotake

    Dinesh Rotake received the B.Sc.(Computer Science) and B.E. (Electronics) degree from Nagpur University, Nagpur, India, in 2004, 2009 respectively, the M.Tech degree in VLSI Design from G.H....


  5. Abhishek Mondal

    I'm presently working in a research group in our college named "BOSE.X". I'm working on nanotechnology and nano medicine on collaboration with it.


  6. carlos alberto may zarinana


  7. E3S Theme II: Nanomechanics eBook

    22 Feb 2020 | | Contributor(s):: Center for Energy Efficient Electronics Science (editor), Tsu-Jae King Liu, Farnaz Niroui, Edgar Acosta, Sergio Fabian Almeida, Vladimir Bulovic, Sara Fathipour, Jinchi Han, Jeffrey H. Lang, Mariana Martinez, Jose Mireles, Rawan Naous, Benjamin Osoba, Jatin Patil, Bivas Saha, Mayuran Saravanapavanantham, Urmita Sikder, Vladimir Stojanovic, Timothy Swager, Aldo Vidana, Junqiao Wu, Alice Ye, David Zubia

    This eBook was written by faculty, postdoctoral researchers, students, and staff of the Center for Energy Efficient Electronics Science (E3S). The Center is a consortium of five world-class academic institutions: University of California at Berkeley, Massachusetts Institute of Technology,...

  8. Nagamalli Arasavalli



  9. Why I am not able to launch sugar cube cantilever tool?

    Q&A|Closed | Responses: 2

    Why I am not able to launch sugar cube cantilever tool?Its giving an error "Error trying retrieve disk"


  10. Neeraj Tripathi


  11. Farhana Twaha


  12. MEMS Resonators as an Enabling Technology

    07 Aug 2019 | | Contributor(s):: Dana Weinstein

  13. ME 290R Lecture 9: Lithography for MEMS and Microfluidics

    08 May 2019 | | Contributor(s):: Taylor, Hayden

  14. girish kh


  15. Creating Inflections: DARPA’s Electronics Resurgence Initiative

    09 Jan 2019 | | Contributor(s):: William Chappell

  16. Oyedamola Andrew Asiyanbola


  17. Dec 05 2018

    Creating Inflections: DARPA’s Electronics Resurgence Initiative

    Speaker: Dr. William ChappellDirector, Microsystems Technology Office (MTO)Description: Dr. William Chappell has served as director of the Microsystems Technology Office (MTO) since 2014...


  18. Microfabrication, Characterization and Sensor Development in the Industrial Space

    07 Nov 2018 | | Contributor(s):: Nithin Raghunathan

    The Birck Nanotechnology center offers a variety of capabilities especially in general microfabrication, electrical and physical characterization. With regards to microfabrication, the center features a variety of toolsets to enable fabrication of most devices from scratch to finish. These...

  19. Graphene Nanopore Drilling

    27 Sep 2018 | | Contributor(s):: Jae Hyun Park, Darren K Adams, Narayan Aluru

    Drilling a nanopore in graphene by Si-nanoparticle bombardment

  20. Paramesh Chandra