More tags
ME 290R Lecture 2.2: Lithography Performance Criteria - Technical (Yield Modeling)
Online Presentations | 27 Mar 2019 | Contributor(s):: Taylor, Hayden
Ways to evaluate a lithography process. Topics include: resolution; line edge roughness; overlay capability; throughput; cost of ownership; capital cost; energy consumption and environmental impact (e.g. solvent usage; material wastage); pattern dependencies.