Negative Bias Temperature Instability (NBTI) in p-MOSFETs: Fast and Ultra-fast Characterization Methods (Part 1 of 3)

By Souvik Mahapatra

Electrical Engineering, IIT Bombay, India

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Researchers should cite this work as follows:

  • Souvik Mahapatra (2012), "Negative Bias Temperature Instability (NBTI) in p-MOSFETs: Fast and Ultra-fast Characterization Methods (Part 1 of 3)," https://nanohub.org/resources/13614.

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Tags

  1. CMOS
  2. CMOS device reliability
  3. Device Characterization
  4. device modelling and simulation
  5. MOSFET
  6. MOSFET modeling
  7. nanoelectronics
  8. Negative Bias Temperature Instability
  9. reliability
Negative Bias Temperature Instability (NBTI) in p-MOSFETs: Fast and Ultra-fast Characterization Methods (Part 1 of 3)
  • Negative Bias Temperature Instability (NBTI) in p-MOSFETs (Part 1 of 3) 1. Negative Bias Temperature Inst… 0
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  • Outline 2. Outline 115.75099945068359
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  • Outline 3. Outline 274.25099945068359
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  • Negative Bias Temperature Instability (NBTI) 4. Negative Bias Temperature Inst… 280.46099948883057
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  • A Simple Physical Framework of NBTI 5. A Simple Physical Framework of… 371.24199771881104
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  • Very Long Time Degradation 6. Very Long Time Degradation 490.31199741363525
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  • Dependence on Stress VG and Gate Leakage 7. Dependence on Stress VG and Ga… 541.18199634552
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  • Dependence on Stress EOX 8. Dependence on Stress EOX 675.00299549102783
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  • Parametric Degradation 9. Parametric Degradation 783.322995185852
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  • Gate Insulator Material / Process Impact 10. Gate Insulator Material / Proc… 905.45299243927
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  • Post Stress NBTI Recovery 11. Post Stress NBTI Recovery 975.44398975372314
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  • DC and AC Stress – Duty Cycle & Frequency 12. DC and AC Stress – Duty Cycl… 1118.7839860916138
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  • Motivation 13. Motivation 1205.4139833450317
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  • Outline 14. Outline 1251.3139848709106
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  • Issues with Measure-Stress-Measure Approach 15. Issues with Measure-Stress-Mea… 1278.0949850082398
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  • Ultra-Fast Measure-Stress-Measure (MSM) Method 16. Ultra-Fast Measure-Stress-Meas… 1350.6749868392944
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  • Ultra Fast MSM (Constant Current) Method 17. Ultra Fast MSM (Constant Curre… 1487.5859823226929
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  • On-The-Fly (OTF) IDLIN Method (Conventional) 18. On-The-Fly (OTF) IDLIN Method … 1592.435980796814
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  • Calculated Degradation from IDLIN Transient 19. Calculated Degradation from ID… 1685.4859838485718
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  • Conventional OTF Measurement Results 20. Conventional OTF Measurement R… 1810.2059850692749
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  • Ultra-Fast On-The-Fly (UF-OTF) IDLIN Method 21. Ultra-Fast On-The-Fly (UF-OTF)… 1889.3969869613648
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  • Degradation: Impact of 22. Degradation: Impact of "Time-Z… 2017.7879934310913
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  • Time Evolution of Long-time Degradation 23. Time Evolution of Long-time De… 2147.367995262146
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  • UF-OTF: Bias Dependence of Degradation 24. UF-OTF: Bias Dependence of Deg… 2236.0879964828491
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  • UF-OTF: Temperature Dependence of Degradation 25. UF-OTF: Temperature Dependence… 2305.8379964828491
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  • Mobility Correction 26. Mobility Correction 2404.8779973983765
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  • Summary 27. Summary 2550.4780035018921
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  • Outline 28. Outline 2668.7090063095093
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  • Background – The 29. Background – The "Philosophy… 2710.0690069198608
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  • Flicker Noise Measurement (Pre-stress) 30. Flicker Noise Measurement (Pre… 2794.0590047836304
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  • DCIV Measurements 31. DCIV Measurements 2899.7300024032593
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  • DCIV Measurements 32. DCIV Measurements 2999.0300054550171
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  • Correlation of DCIV to I-V Measurements 33. Correlation of DCIV to I-V Mea… 3137.4700078964233
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  • Charge Pumping Measurements 34. Charge Pumping Measurements 3214.4800100326538
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  • Correlation of CP to I – V Measurements 35. Correlation of CP to I – V M… 3316.5600118637085
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  • Impact of Stress on Flicker Noise 36. Impact of Stress on Flicker No… 3405.0310125350952
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  • Direct Comparison of Multiple Measurements 37. Direct Comparison of Multiple … 3493.3510122299194
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  • Comparison of CP and OTF-IDLIN (t0=1ms) 38. Comparison of CP and OTF-IDLIN… 3616.0620107650757
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  • Low Voltage (LV) SILC 39. Low Voltage (LV) SILC 3690.6720113754272
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  • Anomalous NBTI Degradation? 40. Anomalous NBTI Degradation? 3784.3020086288452
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  • Anomalous NBTI – Bulk Trap Generation 41. Anomalous NBTI – Bulk Trap G… 3821.9130086898804
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  • Hot Hole Induced Generation of Bulk Traps 42. Hot Hole Induced Generation of… 3901.90300655365
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  • Summary 43. Summary 4048.1730108261108
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  • Outline 44. Outline 4109.36300945282
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