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Learning Module: MEMS Micromachining Overview
Teaching Materials | 22 Jun 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
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Learning Module: MEMS Micromachining Overview - Instructor Guides
Teaching Materials | 22 Jun 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
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Learning Module: Etch Processes Overview for Microsystems
Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces the most common etch processes used for the fabrication of microsystems. Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.
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Learning Module: Etch Processes Overview for Microsystems - Instructor Guides
Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces the most common etch processes used for the fabrication of microsystems. Activities allow students to demonstrate their understanding of the terminology and basic concepts of these processes.