Tags: bulk etch

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  1. Learning Module: MEMS Micromachining Overview

    22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage...

  2. Learning Module: MEMS Micromachining Overview - Instructor Guides

    22 Jun 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage...

  3. Learning Module: Etch Processes Overview for Microsystems

    25 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.

  4. Learning Module: Etch Processes Overview for Microsystems - Instructor Guides

    25 Apr 2017 | | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow students to demonstrate their understanding of the terminology and basic concepts of these processes.