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Can I use this version to simulate a two-stage implantation process with multiple dopants, energy levels, and tilt angles?
Q&A|Open | Responses: 1
https://nanohub.org/answers/question/2658
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Ion Implantation, Thermal Oxidation and Atomic Layer Deposition
Online Presentations | 07 Oct 2022 | Contributor(s):: Atilla Ozgur Cakmak, Rich Hill, NACK Network
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Rajkumar Sahu
https://nanohub.org/members/173239
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Tsuprem4 simulation
Q&A|Closed | Responses: 0
I am using Tsuprem4 , i want to simulate germanium ion implant with different AMU
How to write in the tsuprem4 deck the changing of different type of AMU
tahnks for...
https://nanohub.org/answers/question/1495
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Kevin Grossklaus
I am a graduate research assistant at the University of Michigan- Ann Arbor, working in the Millunchick group. My research exams ion irradiation effects on III-V semiconductor film growth, ion beam...
https://nanohub.org/members/60848
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Hadley Pattin
https://nanohub.org/members/59723
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Process Modeling
Series | 23 Aug 2011 | Contributor(s):: Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
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Silvaco Athena - Part 1
Teaching Materials | 04 Aug 2011 | Contributor(s):: Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
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ACUTE - Process Simulation Assignment
Teaching Materials | 28 Jul 2011 | Contributor(s):: Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.