Process Lab: Defect-coupled diffusion
Tools | 09 Oct 2006 | Contributor(s): Shuqing (Victor) Cao, Yang Liu, Peter Griffin
This tool simulates dopant diffusion coupled with point defects.
Process Lab: Concentration-Dependent Diffusion
This modules simulates both the standard diffusion and concentration-dependent diffusion.
Process Lab: Oxidation Flux
This module simulates the oxidation flux.
Process Lab:Oxidation
Integrated Circuit Fabrication Process Simulation
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