nanoHUB.org - Resources: Process Lab:Oxidation: Citations

Home › Tools › Process Lab:Oxidation › Citations

Process Lab:Oxidation

By Shuqing (Victor) Cao¹; Yang Liu¹; Peter Griffin¹

1. Stanford University

Integrated Circuit Fabrication Process Simulation

You must login before you can run this tool.

Version 1.1 - published on 30 Oct 2019

doi:10.21981/18BY-KY85 cite this

This tool is closed source.

View All Supporting Documents

Intermediate-Advanced

Difficulty Level		Target Audience
	K-12	Middle/High School
	Easy	Freshmen/Sophomores
	Intermediate	Juniors/Seniors
	Advanced	Graduate Students
	Expert	PhD Experts

3024 users, detailed usage

2 questions (Ask a question)

2 review(s) (Review this)

1 wish(es) (New Wish)

Citations Non-affiliated (0) | Affiliated (1)

Affiliated authors

Gerhard Klimeck, M. McLennan, Mark Lundstrom, George Adams III, (2008), "nanoHUB.org - online simulation and more materials for semiconductors and nanoelectronics in education and research", 8th Ieee Conference On Nanotechnology, 2008. Nano , Nanotechnology, 2008. NANO'08. 8th IEEE Conference on, : pg: 401-404, IEEE, 08
BibTex | EndNote