Transistor Scaling: The Age of Innovation
Transistor Scaling: The Age of Innovation
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1. Transistor Scaling: The Age of…
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2. Outline
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3. Moore's Law - 1965
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4. The Cost Reduction Engine that…
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5. And Enables Energy Efficiency
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6. Three Decades of Scaling Conta…
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7. Moore's Law: circa 2008
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8. Classical Transistor Scaling
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9. Dimensional Scaling
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10. Mobility Scaling
402.60260260260264
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11. Gate Oxide Scaling
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12. Voltage Scaling
465.29863196529863
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13. Classical Scaling
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14. Is the End of Scaling Near?
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15. Outline
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16. The Age of Material & Structur…
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17. New Materials are key enablers
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18. Uniaxial Strain
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19. Biaxial Tensile Strain
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20. Biaxial vs. Uniaxial Strain: E…
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21. Biaxial vs. Uniaxial Strain
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22. High-k + Metal Gate
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23. Replacement Metal Gate Flow - …
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24. Replacement Metal Gate Flow - …
1186.0193526860194
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25. Replacement Metal Gate Flow - …
1192.258925592259
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26. Replacement Metal Gate Flow - …
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27. Replacement Metal Gate Flow - …
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28. Serendipity
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29. Tri-Gate Transistors
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30. Transistor Features Tri-ga…
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31. Excellent short channel effect…
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32. Short Channel Effects
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33. Tri-Gate Self-Aligned Double P…
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34. Self-Aligned Contact (SAC)
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35. Self-Aligned Contact (SAC)
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36. Transistor Scaling Continues
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37. The Golden Age of Transistor I…
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38. Outline
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39. Enabling a Steady Technology C…
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40. How Far Can We
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41. Innovation-Enabled Technology …
1970.8375041708375
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42. Optimizing Choices for Transis…
2017.2505839172507
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43. Production 22nm Tri-Gate Trans…
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44. Research Nanowire Transistors …
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45. III-V Progress Scorecard
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46. Future Visibility: Interconnec…
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47. 3-D Chip Stacking & Other ways…
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48. Beyond 2020 and possible futur…
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49. Our limit to visibility goes o…
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50. Is the End of Scaling Near?
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51. Discussion
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