Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors

Dana Weinstein; Luca Daniel; Bichoy W. Bahr

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Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors

By Dana Weinstein¹; Luca Daniel¹; Bichoy W. Bahr²

1. Electrical Engineering and Computer Science, Massachusetts Institute of Technology (MIT), Cambridge, MA 2. HybridMEMS Group, Massachusetts Institute of Technology (MIT), Cambridge, MA

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