Thermoreflectance Imaging, Copper Via Reliability and Non- Local Thermal Transport

By Ali Shakouri

Birck Nanotechnology Center, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Ali Shakouri (2015), "Thermoreflectance Imaging, Copper Via Reliability and Non- Local Thermal Transport," https://nanohub.org/resources/21979.

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1099, Birck Nanotechnology Center, Purdue University, West Lafayette, IN

Tags

  1. Imaging
  2. nanoelectronics
  3. thermal transport
Thermoreflectance Imaging, Copper Via Reliability and Non- Local Thermal Transport
  • Thermoreflectance Imaging, Copper Via Reliability and Non-Local Thermal Transport 1. Thermoreflectance Imaging, Cop… 0
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  • Copper via chains 2. Copper via chains 26.026026026026027
    00:00/00:00
  • Via resistance shift after aging at 200C 3. Via resistance shift after agi… 55.321988655321988
    00:00/00:00
  • J. Christofferson, et al, J. Electronic Packaging,130 (4) 041101, 2008 4. J. Christofferson, et al, J. E… 119.652986319653
    00:00/00:00
  • High resolution thermoreflectance imaging 5. High resolution thermoreflecta… 216.016016016016
    00:00/00:00
  • Picosecond thermal imaging (800ps) 6. Picosecond thermal imaging (80… 250.08341675008342
    00:00/00:00
  • High Speed Thermal Imaging (800ps) 7. High Speed Thermal Imaging (80… 346.14614614614618
    00:00/00:00
  • Copper Via 8. Copper Via 387.22055388722055
    00:00/00:00
  • Thermal map of 10 via chain under bias 9. Thermal map of 10 via chain un… 482.04871538204873
    00:00/00:00
  • Thermal map of 10 via chain under bias 10. Thermal map of 10 via chain un… 527.96129462796137
    00:00/00:00
  • Relative change in R and DT 11. Relative change in R and DT 591.65832499165833
    00:00/00:00
  • Local temperature T(t) relation to the initial local temperature T(t=0) 12. Local temperature T(t) relatio… 965.36536536536539
    00:00/00:00
  • Fourier Law/ Thermal Conductivity 13. Fourier Law/ Thermal Conductiv… 1026.0593927260595
    00:00/00:00
  • Thin film silicon thermal conductivity 14. Thin film silicon thermal cond… 1061.7951284617952
    00:00/00:00
  • Thin Film Thermal Characterization 15. Thin Film Thermal Characteriza… 1101.7017017017017
    00:00/00:00
  • Is all of the physics in the expression for the Thermal Conductivity? 16. Is all of the physics in the e… 1195.3620286953621
    00:00/00:00
  • Phonon Mean Free Paths in Silicon / SiGe 17. Phonon Mean Free Paths in Sili… 1295.6623289956624
    00:00/00:00
  • ∂T/∂t = D'∂1.6T/∂x1.6 18. ∂T/∂t = D'∂1.6T/∂x1.6 1455.8224891558225
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  • Time Domain Thermoreflectance (TDTR) Fittings 19. Time Domain Thermoreflectance … 1523.2565899232566
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  • Phonon relaxation time ↔ Lévy Exponent 20. Phonon relaxation time ↔ Lé… 1639.6396396396397
    00:00/00:00
  • SiGe 21. SiGe 1685.2852852852855
    00:00/00:00
  • Fourier Heat Equation 22. Fourier Heat Equation 1821.3213213213214
    00:00/00:00
  • Untitled: Slide 23 23. Untitled: Slide 23 2096.4297630964297
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  • delta excitation: Temperature inside alloy 24. delta excitation: Temperature … 2276.0093426760095
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