ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I
ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I
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1. Lecture 13.1: Emerging X-ra…
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2. Emerging optical/x-ray based m…
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3. X-ray zone plate array lithogr…
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4. Zone plate array lithography w…
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5. Zone plate arrays
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6. Near-field techniques
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7. Intensity "dip"
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8. Intensity "dip"
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9. Embossed resist as its own opt…
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10. Roll-to-roll photolithography
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11. Roll-to-roll photolithography
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12. Roll-to-roll photolithography
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13. Frequency multiplication based…
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14. Printing color at the nanoscal…
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15. Printing color at the nanoscal…
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16. Printing color at the nanoscal…
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17. Interference lithography
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18. 2D arrays are possible by inte…
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19. Sequential exposures
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20. Interference lithography for E…
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21. Printing arbitrary patterns by…
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22. Printing arbitrary patterns by…
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23. Printing arbitrary patterns by…
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24. 3D projection lithography appr…
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25. Controlling focal point in pro…
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26. Controlling focal point in pro…
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27. Photolithography on optical fi…
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