Tags: processing

All Categories (1-20 of 99)

  1. Learning Module: MEMS Micromachining Overview

    22 Jun 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). ...

    https://nanohub.org/resources/26733

  2. Learning Module: MEMS Micromachining Overview - Instructor Guides

    22 Jun 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). ...

    https://nanohub.org/resources/26734

  3. Learning Module: Photolithography Overview for MEMS

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...

    https://nanohub.org/resources/26380

  4. ECE 695Q Lecture 42: Advanced Lithography II

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25157

  5. ECE 695Q Lecture 45: Dry Etching I

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25160

  6. ECE 695Q Lecture 44: Etching

    02 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25159

  7. ECE 695Q Lecture 46: Dry Etching II

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25161

  8. ECE 695Q Lecture 47: Dry Etching III

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25162

  9. ECE 695Q Lecture 48: Planarization I

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25167

  10. ECE 695Q Lecture 49: Planarization II

    01 Dec 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25168

  11. ECE 695Q Lecture 43: Advanced Lithography III

    01 Nov 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25158

  12. ECE 695Q Lecture 41: Advanced Lithography I

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25003

  13. ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25000

  14. ECE 695Q Lecture 37: Nanoimprint Lithography (NIL) - Resist for UV-NIL

    12 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24961

  15. ECE 695Q Lecture 29: Focused Electron Beam Induced Deposition and Deposition Rate

    10 Oct 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24469

  16. ECE 695Q Lecture 36: Nanoimprint Lithography (NIL) – Alignment in NIL

    28 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24960

  17. ECE 695Q Lecture 39: Nanoimprint Lithography (NIL) – NIL Tools

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25001

  18. ECE 695Q Lecture 40: Nanoimprint Lithography (NIL) – Other NIL Approaches

    26 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/25002

  19. ECE 695Q Lecture 32: Nanoimprint Lithography (NIL) – Overview and Thermal NIL Resists

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24956

  20. ECE 695Q Lecture 33: Nanoimprint Lithography – Residual Layer After Nanoimprint

    21 Sep 2016 | Online Presentations | Contributor(s): Minghao Qi

    https://nanohub.org/resources/24957