Tags: MEMS

All Categories (1-20 of 71)

  1. Learning Module: Introduction to Actuators

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "actuators" - what they...

    https://nanohub.org/resources/26586

  2. Learning Module: Introduction to Actuators - Instructor Guides

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "actuators" - what they...

    https://nanohub.org/resources/26587

  3. Learning Module: Introduction to Sensors

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "sensors" - what they are,...

    https://nanohub.org/resources/26571

  4. Learning Module: Introduction to Sensors - Instructor Guides

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "sensors" - what they are,...

    https://nanohub.org/resources/26572

  5. Learning Module: Introduction to Transducers

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "transducers" - what they...

    https://nanohub.org/resources/26564

  6. Learning Module: Introduction to Transducers - Instructor Guides

    17 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "transducers" - what they...

    https://nanohub.org/resources/26557

  7. Learning Module: History of MEMS

    10 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides a timeline of the progression of microtechnology through a series of innovations that starts with the first Point Contact Transistor built in 1947 and ends with the...

    https://nanohub.org/resources/26533

  8. Learning Module: History of MEMS - Instructor Guides

    10 May 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides a timeline of the progression of microtechnology through a series of innovations that starts with the first Point Contact Transistor built in 1947 and ends with the...

    https://nanohub.org/resources/26524

  9. Learning Module: Crystallography Overview for MEMS

    27 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are...

    https://nanohub.org/resources/26438

  10. Learning Module: Crystallography Overview for MEMS - Instructor Guides

    27 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are...

    https://nanohub.org/resources/26427

  11. Learning Module: Photolithography Overview for MEMS

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts. ...

    https://nanohub.org/resources/26380

  12. Learning Module: Photolithography Overview for MEMS - Instructor Guides

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning modules provides an overview of the most common photolithography process used in the fabrication of microelectromechnical systems (MEMS), its terminology and basic concepts. ...

    https://nanohub.org/resources/26371

  13. Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides

    26 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are...

    https://nanohub.org/resources/26349

  14. Learning Module: Etch Processes Overview for Microsystems

    25 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow you to demonstrate your understanding of the terminology and basic...

    https://nanohub.org/resources/26398

  15. Learning Module: Etch Processes Overview for Microsystems - Instructor Guides

    25 Apr 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow students to demonstrate their understanding of the terminology and...

    https://nanohub.org/resources/26388

  16. [Illinois] Piezoelectric MEMS Devices for Future RF Front Ends

    13 Apr 2017 | Online Presentations | Contributor(s): Songbin Gong

    9/8/2016 MNTL Industry Affiliates Program

    https://nanohub.org/resources/26273

  17. Learning Module: Hazardous Materials I and II

    27 Mar 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should...

    https://nanohub.org/resources/26138

  18. Learning Module: Hazardous Materials I and II - Instructor Guides

    27 Mar 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should...

    https://nanohub.org/resources/26128

  19. Learning Module: Chemical Lab Safety Rules - Instructor Guides

    27 Mar 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  This learning module provides the general safety rules for working in...

    https://nanohub.org/resources/26092

  20. Learning Module: Interpreting Chemical Labels - Instructor Guide

    27 Mar 2017 | Teaching Materials | Contributor(s): Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  OSHA requires specific information about a chemical to be on its label....

    https://nanohub.org/resources/26107