This tool is created to allow users to enter basic information about a MEMS actuator and obtain a reasonably accurate estimation of the actuation response of the actuator. A compact model based on a scaling theory developed in Ref.  provides an almost instantaneous estimation of the actuation voltages (pull-in voltage and pull-out voltage) and the hysteretic CV characteristics (for both below pull-in and post pull-in states). A more comprehensive numerical simulation option, which employs the Kirchoff-Love plate equation, is also available. Quasi-static and dynamic response for cantilever, fixed-fixed and circular beam shapes can be obtained using the numerical simulation. A method-of-moments based 3D Poisson solver can also be invoked if necessary. For users who want to understand the basics of MEMS actuator operation, quasi-static and dynamic simulations can be performed for a simple spring-mass model.
By Pradeep Kumar Gudla, Aswin Kannan, Zhi Tang, Narayan Aluru, University of Illinois at Urbana-Champaign (2009)