ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication

By Minghao Qi

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

View Presentation

Additional materials available (4)

Category

Online Presentations

Published on

Cite this work

Researchers should cite this work as follows:

  • Minghao Qi (2016), "ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication," https://nanohub.org/resources/25000.

    BibTex | EndNote

Time

Location

226 Electrical Engineering, Purdue University, West Lafayette, IN

Tags

  1. lithography
  2. nano fabrication
  3. nanoimprint lithography
  4. processing
ECE 695Q Lecture 38: Nanoimprint Lithography (NIL) – NIL Mold Fabrication
  • Lecture 38 Nanoimprint Lithography (NIL) – NIL Mold Fabrication 1. Lecture 38 Nanoimprint Lithogr… 0
    00:00/00:00
  • Nil mold fabrication 2. Nil mold fabrication 14.914914914914915
    00:00/00:00
  • Mold for thermal and UV-NIL 3. Mold for thermal and UV-NIL 18.218218218218219
    00:00/00:00
  • Comparison with photomask 4. Comparison with photomask 126.62662662662663
    00:00/00:00
  • Mold issues: profile, roughness, sticking 5. Mold issues: profile, roughnes… 171.47147147147149
    00:00/00:00
  • Importance of anti-stick coating 6. Importance of anti-stick coati… 239.40607273940609
    00:00/00:00
  • Mold release agent: Teflon-like coating 7. Mold release agent: Teflon-lik… 293.0930930930931
    00:00/00:00
  • Ni mold 8. Ni mold 356.69002335669006
    00:00/00:00
  • SEM images of Ni molds 9. SEM images of Ni molds 449.81648314981652
    00:00/00:00
  • Soft PDMS/PMMA mold for UV-NIL 10. Soft PDMS/PMMA mold for UV-NIL 510.643977310644
    00:00/00:00
  • Soft PDMS/hard PDMS mold for UV-NIL 11. Soft PDMS/hard PDMS mold for U… 579.2125458792126
    00:00/00:00
  • Other polymer mold materials 12. Other polymer mold materials 604.30430430430431
    00:00/00:00
  • Diamond Molds 13. Diamond Molds 662.42909576242914
    00:00/00:00
  • DLC deposition by PECVD 14. DLC deposition by PECVD 720.42042042042044
    00:00/00:00
  • Mold by MBE and selective wet-etching 15. Mold by MBE and selective wet-… 743.6102769436103
    00:00/00:00
  • Mold fabricated by nature 16. Mold fabricated by nature 826.12612612612611
    00:00/00:00
  • Results of NIL using cicada wing mold 17. Results of NIL using cicada wi… 844.54454454454458
    00:00/00:00
  • Mold fabricated by engineers 18. Mold fabricated by engineers 881.01434768101433
    00:00/00:00
  • Etching issues for mold fabrication 19. Etching issues for mold fabric… 939.60627293960636
    00:00/00:00
  • ICP quartz mold etch: process control 20. ICP quartz mold etch: process … 975.84250917584257
    00:00/00:00
  • Pillar array mold fabrication 21. Pillar array mold fabrication 986.1194527861195
    00:00/00:00
Pop Out