By jason clark1; Prabhakar Marepalli1; xing jin1; Aarti Chigullapalli1

1. Purdue University

MEMS design, modeling, and simulation

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Version 0.05w - published on 16 Apr 2015

doi:10.4231/D3J38KJ5S cite this

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SugarCube is a tool which facilitates the parameterization of ready-made MEMS. Using this tool one can investigate the performance of parameterized MEMS which are available in the form of hierarchical libraries. SugarCube is a front end of Sugar modeling and simulation engine. It has hierarchical library of commonly-used MEMS, many of which are previously published in literature. Once a user selects a system to explore, he can modify the parameters (geometric and material) and inspect the performance of the tool with these new conditions. Different kinds of analysis like static, transient or frequency are possible. The numerical results are plotted and the deflected MEMS is displayed. The data can be saved and downloaded. In addition, SugarCube determines the geometry of ready-made MEMS as a function of desired performance. That is, given a parameterized MEMS design and a performance characteristic such as resonance frequency, deflection per voltage or temperature, chip real estate size, etc., SugarCube returns the geometrically modified version of the MEMS design that meets the desired performance characteristic. [Note: We are currently in the process of publishing the latest version of SugarCube with several significant updates]

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Researchers should cite this work as follows:

  • jason clark, Prabhakar Marepalli, xing jin, Aarti Chigullapalli (2015), "SugarCube," (DOI: 10.4231/D3J38KJ5S).

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