MEMS Resonator - Tang

By Fengyuan Li1; Jason Clark1

1. Purdue University

Parametric Tang's Comb-Drive Modeling and Simulation

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Version 1.1 - published on 20 Aug 2014

doi:10.4231/D3PG1HP54 cite this

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The tool is currently designed to simulate Tang's comb-drive. All the inputs such as geometric size, material properties, actuation information are parameters transparent to users. There are two different simulations can be done: static analysis and (up to two parameters) sweep analysis. In the static analysis, the original and actuated 3D model pictures are provided. A table of all the deflection value of the center point as well as the netlist used to created the model in SUGAR are also downloaded. In the sweep test, a family of sweeping curves is plotted and all the numerical values are offered as a text file.


This tool is based on the work of LI, Fengyuan (Thomas) and CLARK, Jason.

Cite this work

Researchers should cite this work as follows:

  • Fengyuan Li, Jason Clark (2014), "MEMS Resonator - Tang," (DOI: 10.4231/D3PG1HP54).

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