ACUTE - Process Simulation Assignment

By Dragica Vasileska1, Gerhard Klimeck2

1. Arizona State University 2. Purdue University

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Abstract

This assignment teaches the students the ion implantation process.

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Researchers should cite this work as follows:

  • Dragica Vasileska; Gerhard Klimeck (2011), "ACUTE - Process Simulation Assignment," https://nanohub.org/resources/11742.

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