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Silvaco TCAD (High Memory)
10 Oct 2024 | Contributor(s):: Gerhard Klimeck, Steven Clark, Alejandro Strachan, Eric Guichard, Thomas Jokinen
SILVACO Semiconductor Process and Device Simulation for Educational Purposes Only, see License below.
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Silvaco TCAD
Tools | 28 Sep 2022 | Contributor(s):: Eric Guichard, Silvaco, Inc.
SILVACO Semiconductor Process and Device Simulation for Educational Purposes Only, see License below.
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Craig Connolly
https://nanohub.org/members/125804
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Process Modeling
Series | 23 Aug 2011 | Contributor(s):: Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
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Silvaco Athena - Part 3
Teaching Materials | 09 Aug 2011 | Contributor(s):: Dragica Vasileska
This set of slides describes the fabrication of 100 nm channel length MOSFET device. At the end the formation of Bird's Beaks is discussed.
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Introduction to process modeling
Teaching Materials | 04 Aug 2011 | Contributor(s):: Dragica Vasileska, Gerhard Klimeck
This set of slides introduces the students into basic concepts of process modeling.
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Silvaco Athena - Part 1
Teaching Materials | 04 Aug 2011 | Contributor(s):: Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
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Silvaco Athena - Part 2
Teaching Materials | 04 Aug 2011 | Contributor(s):: Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
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ACUTE - Process Simulation Assignment
Teaching Materials | 28 Jul 2011 | Contributor(s):: Dragica Vasileska, Gerhard Klimeck
This assignment teaches the students the ion implantation process.
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hitesh kumar sahoo
https://nanohub.org/members/36038