ECE 695A Lecture 16: Temperature Dependence of HCI
ECE 695A Lecture 16: Temperature Dependence of HCI
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1. Lecture 16: Temperature depend…
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2. copyright 2013
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3. Outline
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4. Empirical observations (1)
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5. Empirical Observation (2)
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6. Outline
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7. A model for HCI degradation
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8. HCI: Temperature dependence
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9. Dissociation by energy flow: W…
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10. Dissociation of Si-H or Si-O b…
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11. Bond dissociation: RRK Theory
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12. Bond dissociation at low volta…
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13. Outline
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14. HCI T-Dependence: Si-H Dissoci…
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15. Recall: Field dependence of HC…
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16. Dissociation of SiH bonds
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17. SiH T-Dependence: MVE Theory
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18. Outline
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19. Si-O bond dissociation
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20. Recall: Heating of Electrons
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21. Temp dependence of impact ioni…
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22. Recall: Rate of impact ionizat…
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23. Temp. Dependence of Impact Ion…
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24. T-Dependent SiO dissociation: …
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25. If compensated, what about VT …
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26. The puzzle of VT shift
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27. Conclusions
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28. References
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