Study of the Interface Roughness Models using 3D Finite Element Schrödinger Equation Corrected Monte Carlo Simulator on Nanoscaled FinFET
Study of the Interface Roughness Models using 3D Finite Element Schrödinger Equation Corrected Monte Carlo Simulator on Nanoscaled FinFET
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1. Study of the Interface Roughne…
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2. What I am going to talk about.…
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3. Scattering limits CMOS perform…
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4. Investigated FinFET devices Pe…
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5. Which model? Ando1
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6. Overview of the simulation too…
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7. Extract data for EPN
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8. Step-by-step
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9. Change in scattering rate
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10. Larger limiting effect of EPN …
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11. Scattering at different energi…
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12. Difference in real space VD = …
587.38738738738743
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13. Volume inversion VD = 0.7 V an…
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14. The point is... Successful imp…
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15. New Bay Campus!
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