Tags: NEMS/MEMS

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Description

The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.

MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors

Learn more about NEMS/MEMS from the many resources on this site, listed below. More information on NEMS/MEMS can be found here.

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  1. Learning Module: Photolithography Overview for MEMS - Instructor Guides

    Teaching Materials | 26 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning modules provides an overview of the most common photolithography process used in the fabrication of microelectromechnical systems (MEMS), its terminology and basic concepts.  Activities allows students to further explore some of these concepts.

  2. Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides

    Teaching Materials | 26 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties...

  3. Learning Module: Etch Processes Overview for Microsystems

    Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.

  4. Learning Module: Etch Processes Overview for Microsystems - Instructor Guides

    Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow students to demonstrate their understanding of the terminology and basic concepts of these processes.

  5. [Illinois] Piezoelectric MEMS Devices for Future RF Front Ends

    Online Presentations | 13 Apr 2017 | Contributor(s):: Songbin Gong

    9/8/2016 MNTL Industry Affiliates Program

  6. Learning Module: Hazardous Materials I and II

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should provide students and employees with the knowledge and confidence needed to work in environments in which...

  7. Learning Module: Hazardous Materials I and II - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should provide students and employees with the knowledge and confidence needed to work in environments in which...

  8. Learning Module: Safety Data Sheets (SDS)

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    A Safety Data Sheet (SDS) contains valuable information and OSHA required information on a chemical - its physical and chemical properties, potential hazards, proper methods for storing and transporting, and much more.  This learning module provides information on the requirements and...

  9. Learning Module: Safety Data Sheets (SDS) - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    A Safety Data Sheet (SDS) contains valuable information and OSHA required information on a chemical - its physical and chemical properties, potential hazards, proper methods for storing and transporting, and much more.  This learning module provides information on the requirements and...

  10. Learning Module: Chemical Lab Safety Rules - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  This learning module provides the general safety rules for working in facilities and laboratories that use chemicals.  Through its activities, the learning module gives...

  11. Learning Module: Interpreting Chemical Labels

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  OSHA requires specific information about a chemical to be on its label. This learning module provides information needed to interpret chemical labels and symbols used. ...

  12. Learning Module: Interpreting Chemical Labels - Instructor Guide

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  OSHA requires specific information about a chemical to be on its label. This learning module provides information needed to interpret chemical labels and symbols used. ...

  13. Learning Module: Personal Protective Equipment (PPE)

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning modules introduces you to the types of personal protective equipment (PPE) required when working in a manufacturing or laboratory environment.  The purpose of PPE is discussed as well as the type of PPE required for different tasks.

  14. Learning Module: Personal Protective Equipment (PPE) - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning modules introduces students to the types of personal protective equipment (PPE) required when working in a manufacturing or laboratory environment.  The purpose of PPE is discussed as well as the type of PPE required for different tasks.

  15. Learning Module: MEMS Applications Overview - Instructor Guides

    Teaching Materials | 07 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    Microelectromechcanical Systems (MEMS) rotate the screens on your smartphones, trigger airbags in a car crash, and beat the hearts of patients with serious heart problems.  In this learning module students are introduced to some of the many applications of MEMS and then allowed to explore...

  16. Learning Module: MEMS Applications Overview

    Teaching Materials | 07 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    Microelectromechcanical Systems (MEMS) rotate the screens on your smartphones, trigger airbags in a car crash, and beat the hearts of patients with serious heart problems.  In this learning module you are introduced to some of the many applications of MEMS and then allowed to explore MEMS...

  17. Learning Module: Micro Pressure Sensors & the Wheatstone Bridge

    Teaching Materials | 24 Feb 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module allows you to explore micro and nano-sized pressure sensors - their applications, design and fabrication, and operation.  Because the Wheatstone bridge (a specialized electronic circuit) is used as the sensing circuit of such pressure sensors, the module also goes into...

  18. Learning Module: Micro Pressure Sensors & the Wheatstone Bridge - Instructor Guides

    Teaching Materials | 24 Feb 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This purpose of this learning module is to allow students the opportunity to explore micro pressure sensors - their applications, design and fabrication, and operation.

  19. Learning Module: Microcantilevers - Instructor Materials

    Teaching Materials | 09 Feb 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    ­This learning module is an overview of microcantilevers, how they work and how they are used in micro and nanotechnology.  These are the instructor materials.

  20. Learning Module: Microcantilevers

    Teaching Materials | 09 Feb 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces you to the microcantilever, its applications in micro and nanotechnologies, its use in sensor arrays, and how it works in both static and dynamic modes of operation.  There is a pre and post-test, four (4) informational units (PKs), and two (2)...