An Introduction to BioMEMS and Bionanotechnology

By Rashid Bashir

University of Illinois at Urbana-Champaign



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BioMEMS and Bionanotechnology have the potential to make significant impact in a wide range of fields and applications. This lecture series introduces the basic concepts and topics underlying the interdisciplinary areas of BioMEMS and Bionanotechnology. Advances in this field require the knowledge of polymer processing and soft lithography in addition to silicon-inspired fabrication. Since the primary aim of many of these devices and systems is to form sensors for biological and chemical entities, an introduction to DNA, proteins, and microbiology is also essential. These devices and systems are designed to handle fluids at these small scale and hence the basic concepts of microfluidics need to be reviewed. Means to transport fluids and biological entities in these devices are necessary for the proper functioning and design of integrated devices, that can perform complete analysis on biological and chemical samples. These key topics are reviewed in this lecture series to equip the listener to get engaged deeper in these exciting areas of research.


Rashid Bashir is currently an Associate Professor of Electrical and Computer Engineering and of Biomedical Engineering at Purdue University. Before coming to Purdue, he spent 6 years at National Semiconductor in the Process Technology Development Group as Sr. Engineering Manager. He has authored or coauthored over 100 journal and conference papers and has over 25 patents. His research interests include biomedical microelectromechanical systems, applications of semiconductor fabrication to biomedical engineering, advanced semiconductor fabrication techniques, and nano-biotechnology. In 2000, he received the NSF Career Award for his work in Biosensors and BioMEMS. He also received the Joel and Spira Outstanding Teaching award from School of ECE at Purdue University. He was also selected by National Academy of Engineering to attend the Frontiers in Engineering Workshop in Fall 2003.

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Researchers should cite this work as follows:

  • Rashid Bashir (2005), "An Introduction to BioMEMS and Bionanotechnology,"

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Lecture Number/Topic Online Lecture Video Lecture Notes Supplemental Material Suggested Exercises
Lecture 1: Introduction, Device Fabrication Methods, DNA and Proteins View on YouTube View Notes (pdf)

Lecture 2: Essentials of Microbiology, Introduction to Microfluidics View on YouTube View Notes (pdf)

Lecture 3: Microfluidic Transport (cont), Sensing Methodologies View on YouTube View Notes (pdf)

Lecture 4: Sensing Methodologies (cont), Integrated BioMEMS and Nanodevices View on YouTube View Notes (pdf)