MOSCap Learning Materials

by Saumitra Raj Mehrotra, Dragica Vasileska, Gerhard Klimeck, Alejandra J. Magana


By completing the MOSCap Lab in ABACUS - Assembly of Basic Applications for Coordinated Understanding of Semiconductors, users will be able to a) understand the operation of a Metal-Oxide-Semiconductor using energy band diagrams, b) study the effects of interface traps, work function, oxide thickness, etc. on capacitance-voltage output, and c) understand MOS-C C-V characteristics in low and high frequency limits.

The specific objectives of the MOSCap Lab are:


Recommended Reading

Users who are new to the operation of MOS-Caps should consult the following resources:

1. Rober F. Pierret. (1996). Semiconductor Device Fundamentals. Reading, MA: Addison-Wesley. (See especially chapter 16)


* MOSCap: First-Time User Guide

* MOSCap Demonstration: MOS Capacitor Simulation

Theoretical Descriptions

* Tutorial_PADRE_Simulation_Tools.pdf (tutorial)

* Illinois ECE 440 Solid State Electronic Devices, Lecture 31: MOS Capacitor

* Illinois ECE 440 Solid State Electronic Devices, Lecture 32: MOS Threshold Voltage

* Illinois ECE 440 Solid State Electronic Devices, Lecture 33: MOS Capacitance

* ECE 606 Lecture 32: MOS Electrostatics I

* ECE 606 Lecture 33: MOS Electrostatics II

* ECE 606 Lecture 34: MOSCAP Frequency Response

* MOS Capacitors: Theory and Modeling

Tool Verification

* Verification of the Validity of the MOSCap Tool


* MOSCAP Worked out problems (Basic)

Exercises and Homework Assignments

1. Exercise for MOS Capacitors: CV curves and interface and Oxide Charges

2. Exercise: CV curves for MOS capacitors

Solutions to Exercises

Solutions are provided only to instructors!


* ABACUS: Test for MOSCAP Tool


* MOSCAP CV profiling

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